Sputter deposition of SiC coating on silicon wafers

A study is conducted of the effect of substrate temperature during coating on the properties of coated SiC films on Si wafers, using a scratch test technique. While specimen temperature during coating has little effect on deposition rate, it significantly affects the durability of the coating. Scrat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Scripta metallurgica et materialia 1992-09, Vol.27 (5), p.565-570
Hauptverfasser:	Robson, M.T, Blue, C.A, Warrier, S.G, Lin, R.Y
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Nonmetallic Materials Physical properties of thin films, nonelectronic Physics Solid surfaces and solid-solid interfaces Surface energy thermodynamic properties Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!