Hydrophilicity Characterization on Cleaned Bonded Silicon Based Surface

This paper reports on the contact angle measurement analysis on a silicon based surface for anodic bonding process cleaned by three distinct cleaning processes. The three cleaning solutions tested in this experiment were RCA, piranha and acetone. Water Droplet Test (WDT) was done to analyze the contact angle of micro droplet on sample surface. It can be done by dropping a droplet of water in constant volume at the fixed height and angle. Only RCA process constantly decreases the contact angle value after cleaning. The compilations of data strongly proved that all samples become hydrophilic after RCA cleaning process. Samples which undergo piranha and acetone cleaning did not prove any characteristic of hydrophilic or hydrophobic surface after cleaning.