Progress in large-area glass coatings by high-rate sputtering

This article reports on the progress of large-area glass coating under vacuum by high-rate cathode sputtering triggered by the introduction of Germany's new energy conservation regulation for buildings. The main content of the new regulation and its requirements on low-emissivity (low-e) coated insulated glazing are briefly reviewed. Different low-e coatings are compared and new developments in sputtered low-e coatings are discussed. In addition, the impact on coating systems design and recent advances in reliable and arc-free deposition of dielectric films are reviewed.