Study on Surface Feature of Large Die and Polishing Quality during Floating Polishing

During the transferring process of the large die surfaces, there are extensive needs of die surface polishing. Since almost large die surfaces are free-form surfaces, currently, these are almost manually implemented. In order to overcome this barrier, in this paper, firstly, large die surfaces were geometrically characterized, and their polishing processes for the die surfaces features were then analyzed; secondly, the polishing pattern and structure of the floating polishing head were studied, finally, the affecting factors of polishing quality about the floating polishing were studied experimentally versus roughness of polished surfaces with the developed floating polishing experimental prototype in this paper. The affecting factors of polishing quality include the rotation speed of polishing discs, normal acting force on polishing disc, loci of polishing disc movement, feeding rate of polishing disc, grit of abrasive particles, and inclined angle of the acting force on disc, are synchronized and analyzed. These research results are used as operating guides for applications of the floating die polisher.