Continuous and high-throughput nanopatterning methodologies based on mechanical deformation

This feature article provides an overview of several mechanical-based micro- and nanopatterning technologies that can achieve continuous and high-throughput fabrication of various sub-wavelength structures without resorting to the conventional optical lithography technique. These include a template-...

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Veröffentlicht in:	Journal of materials chemistry. C, Materials for optical and electronic devices Materials for optical and electronic devices, 2013-01, Vol.1 (46), p.7681-7691
Hauptverfasser:	Ok, Jong G., Ahn, Se Hyun, Kwak, Moon Kyu, Guo, L. Jay
Format:	Artikel
Sprache:	eng
Schlagworte:	Dynamics Lithography Molds Nanostructure Optoelectronics Patterning Photonics Sweeping
Online-Zugang:	Volltext
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