Continuous and high-throughput nanopatterning methodologies based on mechanical deformation

This feature article provides an overview of several mechanical-based micro- and nanopatterning technologies that can achieve continuous and high-throughput fabrication of various sub-wavelength structures without resorting to the conventional optical lithography technique. These include a template-...

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Veröffentlicht in:Journal of materials chemistry. C, Materials for optical and electronic devices Materials for optical and electronic devices, 2013-01, Vol.1 (46), p.7681-7691
Hauptverfasser: Ok, Jong G., Ahn, Se Hyun, Kwak, Moon Kyu, Guo, L. Jay
Format: Artikel
Sprache:eng
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Zusammenfassung:This feature article provides an overview of several mechanical-based micro- and nanopatterning technologies that can achieve continuous and high-throughput fabrication of various sub-wavelength structures without resorting to the conventional optical lithography technique. These include a template-based and versatile roll-to-roll nanoimprint lithography technique, cost-effective dynamic mould sweeping patterning as well as mould-free patterning methods. Examples of demonstrated and potential applications in optoelectronics and photonics are also discussed.
ISSN:2050-7526
2050-7534
DOI:10.1039/c3tc30908h