The Child-Langmuir collision laws for the cathode sheath of glow discharge in nitrogen
This paper reports the measurements of dc cathode sheath thickness d together with the voltage drop U across it at different current I values in nitrogen. For the case of a narrow gap when the discharge consists only of a cathode sheath and a negative glow almost all voltage applied across the elect...
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Veröffentlicht in: | Vacuum 2014-05, Vol.103, p.49-56 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | This paper reports the measurements of dc cathode sheath thickness d together with the voltage drop U across it at different current I values in nitrogen. For the case of a narrow gap when the discharge consists only of a cathode sheath and a negative glow almost all voltage applied across the electrodes drops across the cathode sheath. We observe that at the nitrogen pressure p 1.5 Torr the Child–Langmuir collision law version characterized by the constant ion mobility is valid. Within the pressure range of 1 |
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ISSN: | 0042-207X 1879-2715 |
DOI: | 10.1016/j.vacuum.2013.12.008 |