The Child-Langmuir collision laws for the cathode sheath of glow discharge in nitrogen

This paper reports the measurements of dc cathode sheath thickness d together with the voltage drop U across it at different current I values in nitrogen. For the case of a narrow gap when the discharge consists only of a cathode sheath and a negative glow almost all voltage applied across the elect...

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Veröffentlicht in:Vacuum 2014-05, Vol.103, p.49-56
Hauptverfasser: Lisovskiy, V.A., Derevianko, V.A., Yegorenkov, V.D.
Format: Artikel
Sprache:eng
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Zusammenfassung:This paper reports the measurements of dc cathode sheath thickness d together with the voltage drop U across it at different current I values in nitrogen. For the case of a narrow gap when the discharge consists only of a cathode sheath and a negative glow almost all voltage applied across the electrodes drops across the cathode sheath. We observe that at the nitrogen pressure p  1.5 Torr the Child–Langmuir collision law version characterized by the constant ion mobility is valid. Within the pressure range of 1 
ISSN:0042-207X
1879-2715
DOI:10.1016/j.vacuum.2013.12.008