32-site microelectrode modified with Pt black for neural recording fabricated with thin-film silicon membrane

Multi-electrode array is an important tool in the study of neural-network, cognition, remembrance, as well as brain-computer-interface, etc. Fork-like 32-site microelectrodes are developed with silicon. By use of integrated circuit technology, the length of the electrodes, the area of the recording sites, as well as the spaces between the sites are closely controlled. SiO2/SiNx/SiO2 composite dielectric membrane and Pt black are introduced to improve the characteristics of the electrodes. The whole thickness of the thin-film probe was 21 p.m. By combining the modifying process with the micro-fabrication method, this kind of silicon based microelectrode satisfies high-density recording and the performance characterization is evaluated by test in vitro and in vivo.