Highly transparent and infrared reflective AZO/Ag/AZO multilayer film prepared on PET substrate by RF magnetron sputtering

AZO/Ag/AZO multilayer films were prepared on PET substrate by radio frequency (RF) magnetron sputtering technology. The prepared films were investigated by optical transmittance spectra, a four-point probe system, X-ray Diffraction (XRD), Scanning Electron Microscope (SEM), Atomic Force Microscopy (...

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Veröffentlicht in:	Vacuum 2014-08, Vol.106, p.1-4
Hauptverfasser:	Miao, Dagang, Jiang, Shouxiang, Shang, Songmin, Chen, Zhuoming
Format:	Artikel
Sprache:	eng
Schlagworte:	Azo AZO/Ag/AZO Flexible solar films Infrared reflection Magnetron sputtering Multilayers Radio frequencies RF magnetron sputtering Scanning electron microscopy Silver Transmittance
Online-Zugang:	Volltext
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