Highly transparent and infrared reflective AZO/Ag/AZO multilayer film prepared on PET substrate by RF magnetron sputtering

AZO/Ag/AZO multilayer films were prepared on PET substrate by radio frequency (RF) magnetron sputtering technology. The prepared films were investigated by optical transmittance spectra, a four-point probe system, X-ray Diffraction (XRD), Scanning Electron Microscope (SEM), Atomic Force Microscopy (AFM), and Fourier Transform Infrared Spectroscopy. The results indicate that Ag inner layer starts forming a continuous film at the thickness about 10 nm. The sample with 10 nm's Ag inner layer exhibited the highest average visible transmittance of 78.5% and 91%'s infrared reflection rate in FIR region. Sample with 15 nm's Ag inner layer showed the highest infrared reflection rate of 96% in FIR region. The high visible transmittance and infrared reflection property of the AZO/Ag/AZO multilayer film makes it a promising candidate for solar films. •High performance solar film was prepared by AZO/Ag/AZO coated multilayer film.•IR reflection rate of the multilayer film was determined by thickness of Ag layer.•IR reflection rate was inversely proportional to film resistivity.•Multilayer film with infrared reflection of 96% in FIR region was acquired.