Improving environmental noise suppression for micronewton force sensing based on electrostatic by injecting air damping

A micro/nano force can be traced to the International System of Units by means of an electrostatic force balance weight system. However, the micro/nano force measurement system is susceptible to environmental disturbances. Various methods have been proposed to reduce the effect of environmental disturbances and obtain high resolution and fast response. In this paper, we introduce a combination of air damping and inherent damping from the internal molecular friction of spring suspension. This will optimize system stability and improve environmental noise suppression. Results from the air damping model show that the damping ratio increases from 0.0005 to 0.1, which improves the vibration resistance. We found that the system with air damping has the advantages of fast response and low scatter.