Strain sensitive Pt–SiO2 nano-cermet thin films for high temperature pressure and force sensors

•Thin films of Pt–SiO2 nano-cermets are prepared by means of co-sputtering.•The films are piezoresistive and respond to strain with a gauge factor of 18.•Annealing steps at 600°C (vacuum) and 300°C (air) do not change the sensitivity.•Pt–SiO2 films are useful for pressure and force sensors for high...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2014-02, Vol.206, p.17-21
Hauptverfasser:	Schmid-Engel, H., Uhlig, S., Werner, U., Schultes, G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Electrical resistivity Gages Gauges Harsh environment Nano-cermet Nanostructure Piezoresistivity Platinum Pressure sensor Sensors Strain Thin films
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