Strain sensitive Pt–SiO2 nano-cermet thin films for high temperature pressure and force sensors

•Thin films of Pt–SiO2 nano-cermets are prepared by means of co-sputtering.•The films are piezoresistive and respond to strain with a gauge factor of 18.•Annealing steps at 600°C (vacuum) and 300°C (air) do not change the sensitivity.•Pt–SiO2 films are useful for pressure and force sensors for high working temperatures. The strain sensitivity, i.e. the resistivity change due to mechanical strain of thin composite nano-cermet films of Pt–SiO2 was investigated. We prepared films with a thickness of 400nm by means of co-sputtering processes at substrate temperatures around 400°C. The specimens respond to uniform strain (ɛ=0.2‰) with gauge factors up to 18. These gauge factors remained high at least up to 250°C in air and also after further annealing up to 600°C in vacuum. Therefore we state these functional films might be suitable for high temperature pressure and force sensors. The films have a relatively high film resistivity of some MΩ/sq and exhibit temperature coefficients of resistance (TCR) in the range of −2000ppm/K up to −600ppm/K. X-ray diffraction revealed a single crystalline fcc platinum phase while transmission electron microscopy proved a typical granular structure of the films. Pt-clusters sized 5–10nm are embedded in an amorphous insulating matrix of silica. The composition of such nano-cermet films displaying high gauge factors is approx. 40at% Pt, 20at% Si and 40at% of O.