Selective-area growth of III-V nanowires and their applications

We review the position-controlled growth of III-V nanowires (NWs) by selective-area metal-organic vapor-phase epitaxy (SA-MOVPE). This epitaxial technique enables the positioning of the vertical NWs on (111) oriented surfaces with lithographic techniques. Core-shell structures have also been achieve...

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Veröffentlicht in:Journal of materials research 2011-09, Vol.26 (17), p.2127-2141
Hauptverfasser: Tomioka, Katsuhiro, Ikejiri, Keitaro, Tanaka, Tomotaka, Motohisa, Junichi, Hara, Shinjiroh, Hiruma, Kenji, Fukui, Takashi
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Sprache:eng
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Zusammenfassung:We review the position-controlled growth of III-V nanowires (NWs) by selective-area metal-organic vapor-phase epitaxy (SA-MOVPE). This epitaxial technique enables the positioning of the vertical NWs on (111) oriented surfaces with lithographic techniques. Core-shell structures have also been achieved by controlling the growth mode during SA-MOVPE. The core-shell III-V NW-based devices such as light-emitting diodes, photovoltaic cells, and vertical surrounding-gate transistors are discussed in this article. Nanometer-scale growth also enabled the integration of III-V NWs on Si regardless of lattice mismatches. These demonstrated achievements should have broad applications in laser diodes, photodiodes, and high-electron mobility transistors with functionality on Si not made possible with conventional Si-CMOS techniques.
ISSN:0884-2914
2044-5326
DOI:10.1557/jmr.2011.103