X-ray nanofocusing using a piezoelectric deformable mirror and at-wavelength metrology methods
An adaptive X-ray mirror with shape controllability in a spatial wavelength range longer than 20mm was developed, and we demonstrated its shape generation and focusing performance characteristics. The shape accuracy in a spatial wavelength range shorter than 20mm, which cannot be adaptively figured,...
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| Veröffentlicht in: | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2013-05, Vol.710, p.93-97 |
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| Hauptverfasser: | , , , , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
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| Online-Zugang: | Volltext |
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| Zusammenfassung: | An adaptive X-ray mirror with shape controllability in a spatial wavelength range longer than 20mm was developed, and we demonstrated its shape generation and focusing performance characteristics. The shape accuracy in a spatial wavelength range shorter than 20mm, which cannot be adaptively figured, was controlled in advance offline. A pencil beam method for measuring the slope error and a phase retrieval method for precisely estimating the wavefront error were employed for online shape correction. A focal spot size of 120nm, which is diffraction-limited, was realized, and the shape accuracy obtained nearly satisfied Rayleigh's quarter-wavelength criterion. |
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| ISSN: | 0168-9002 1872-9576 |
| DOI: | 10.1016/j.nima.2012.11.059 |