Fabrication and characterizations of phosphorus-doped n-type BaSi sub(2) epitaxial films grown by molecular beam epitaxy
Phosphorus (P)-doped BaSi sub(2) films were grown by molecular beam epitaxy. P-doped BaSi sub(2) showed n -type conductivity and the electron concentration increased up to 410 super(17) cm super(-3) at room temperature. The temperature dependence of electron concentration revealed that the activatio...
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Veröffentlicht in: | Physica status solidi. C 2013-12, Vol.10 (12), p.1753-1755 |
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Hauptverfasser: | , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Phosphorus (P)-doped BaSi sub(2) films were grown by molecular beam epitaxy. P-doped BaSi sub(2) showed n -type conductivity and the electron concentration increased up to 410 super(17) cm super(-3) at room temperature. The temperature dependence of electron concentration revealed that the activation energy was approximately 80 meV. ( copyright 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) |
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ISSN: | 1862-6351 1610-1642 |
DOI: | 10.1002/pssc.201300326 |