Parametric nonlinear lumped element model for circular CMUTs in collapsed mode

Parametric nonlinear lumped element model for circular CMUTs in collapsed mode

We present a parametric equivalent circuit model for a circular CMUT in collapsed mode. First, we calculate the collapsed membrane deflection, utilizing the exact electrical force distribution in the analytical formulation of membrane deflection. Then we develop a lumped element model of collapsed m...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2014-01, Vol.61 (1), p.173-181
Hauptverfasser: Aydogdu, Elif, Ozgurluk, Alper, Atalar, Abdullah, Köymen, Hayrettin
Format: Artikel
Sprache:eng
Schlagworte:
Adaptation models
Approximation methods
Capacitance
Computer Simulation
Computer-Aided Design
Electric Capacitance
Electronics - instrumentation
Equipment Design
Equipment Failure Analysis
Force
Insulators
Integrated circuit modeling
Lead
Miniaturization
Models, Theoretical
Nonlinear Dynamics
Transducers
Ultrasonography - instrumentation
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Beschreibung
Zusammenfassung:We present a parametric equivalent circuit model for a circular CMUT in collapsed mode. First, we calculate the collapsed membrane deflection, utilizing the exact electrical force distribution in the analytical formulation of membrane deflection. Then we develop a lumped element model of collapsed membrane operation. The radiation impedance for collapsed mode is also included in the model. The model is merged with the uncollapsed mode model to obtain a simulation tool that handles all CMUT behavior, in transmit or receive. Large- and small-signal operation of a single CMUT can be fully simulated for any excitation regime. The results are in good agreement with FEM simulations.
ISSN:0885-3010
1525-8955
DOI:10.1109/TUFFC.2014.6689785