Large-area YBCO films with low-R(s) prepared by excimer-laser-assisted MOD (ELAMOD) on sapphire substrates

High performance YBa(2)Cu(3)O(7-y) (YBCO) films with large area (50 mm-square) and 300 nm-thick were prepared by a combination of excimer-laser-assisted metalorganic deposition (ELAMOD) and conventional MOD using a fluorine-free coating solution. A characteristic feature in the ELAMOD process is that KrF excimer laser is irradiated on the solution-coated surface of specimen in an ambient atmosphere. The YBCO films on CeO(2)-buffered r-cut sapphire substrates showed low surface resistance (R(s)), high super-conducting current density (J(c)), and good reproducibility in both R(s) and J(c). The R(s) and J(c) values of the films were 0.6 m Omega (12 GHz) and around 2.0 MA/cm(2) at 77.3 K, respectively.