Kinetics of nonsymmetrical impurity segregation at thin film boundaries

Theoretical and numerical analysis is presented for kinetics of impurity segregation at the boundaries of a thin layer of substance dividing two different materials. Time dependences of boundary impurity concentrations and concentration profiles within the film have been obtained. Depending on the e...

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Veröffentlicht in:International Journal of Thin Films Science and Technology 2013-09, Vol.2 (3), p.207-216
Hauptverfasser: Davydova, I M, Melnik, T N, Yurchenko, V M
Format: Artikel
Sprache:eng
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Zusammenfassung:Theoretical and numerical analysis is presented for kinetics of impurity segregation at the boundaries of a thin layer of substance dividing two different materials. Time dependences of boundary impurity concentrations and concentration profiles within the film have been obtained. Depending on the energy of impurity interaction with the boundaries and the temperature, some criteria were established to predict probable realization of segregation process. The time of exhausting of areas adjusting segregation layers and the width of the exhausted zone near the boundaries was evaluated.
ISSN:2090-9519
2090-9527
DOI:10.12785/ijtfst/020306