X-ray and photoelectron spectroscopic nondestructive methods for thin films and interfaces study. Application to SrTiO sub(3) based heterostuctures

The paper is focused on the methods developed by the Authors for mathematical analysis of the data obtained by three independent spectroscopic nondestructive techniques and on their application to the air-exposed SrTiO sub(3) based heterostructures. It was established that the surfaces of all the in...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Microelectronic engineering 2013-09, Vol.109, p.13-16
Hauptverfasser:	Filatova, E O, Kozhevnikov, I V, Sokolov, A A, Yegorova, Y V, Konashuk, A S, Vilkov, O Y, Schaefers, F, Gorgoi, M, Shulakov, A S
Format:	Artikel
Sprache:	eng
Schlagworte:	Damage Density Enrichment Hafnium oxide Interlayers Spectroscopic analysis Spectroscopy Strontium titanates Thin films
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!