X-ray and photoelectron spectroscopic nondestructive methods for thin films and interfaces study. Application to SrTiO sub(3) based heterostuctures

The paper is focused on the methods developed by the Authors for mathematical analysis of the data obtained by three independent spectroscopic nondestructive techniques and on their application to the air-exposed SrTiO sub(3) based heterostructures. It was established that the surfaces of all the investigated SrTiO sub(3) films are carbonate-rich surfaces in the form of SrCO sub(3), of which the content in different samples varied. The density of SrTiO sub(3) films and the interface width between Si-substrate and interlayer depends on the interlayer material. Only the Si sub(3)N sub(4) interlayer supports the Sr-surface enrichment of the film in atmosphere. The HfO sub(2) interlayer promotes the damage of the structure creating numerous defects.