Analyses on Output Signal of Silicon Micro-Machined Gyroscope

The structure and principle of silicon micro-machined gyroscope used for rotating carrier is introduced. The dynamic equations of axially moving are derived by analyzing three-axis moving of MEMS three-axis simulator. The result of simulation shows three moving locus of the head of rolling airframe missile, and three output signals from silicon micro-machined gyroscope which fix on inner plate of three-axis simulator, some rules of three output signals of three moving locus are gained. The signal of the gyroscope couples the frequency of the rotating carrier which makes the coning motion, so the frequency of the coning motion is contained when detecting the frequency of the rotating carrier using the signal of the gyroscope. By analyzing the output signals using Fast Fourier Transform (FFT) algorithm, subtracting the frequency of the rotating carrier, and the relative error is only 1.25% by detecting the self-rotating frequency of the rotating carrier.