25th anniversary article: CVD polymers: a new paradigm for surface modification and device fabrication

Well-adhered, conformal, thin (

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Veröffentlicht in:Advanced materials (Weinheim) 2013-10, Vol.25 (38), p.5392-5423
Hauptverfasser: Coclite, Anna Maria, Howden, Rachel M, Borrelli, David C, Petruczok, Christy D, Yang, Rong, Yagüe, Jose Luis, Ugur, Asli, Chen, Nan, Lee, Sunghwan, Jo, Won Jun, Liu, Andong, Wang, Xiaoxue, Gleason, Karen K
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container_end_page 5423
container_issue 38
container_start_page 5392
container_title Advanced materials (Weinheim)
container_volume 25
creator Coclite, Anna Maria
Howden, Rachel M
Borrelli, David C
Petruczok, Christy D
Yang, Rong
Yagüe, Jose Luis
Ugur, Asli
Chen, Nan
Lee, Sunghwan
Jo, Won Jun
Liu, Andong
Wang, Xiaoxue
Gleason, Karen K
description Well-adhered, conformal, thin (
doi_str_mv 10.1002/adma.201301878
format Article
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source MEDLINE; Wiley Online Library Journals Frontfile Complete
subjects Chemistry - methods
Fluorine - chemistry
Gases - chemistry
Humans
Polymerization
Polymers - chemistry
Surface Properties
Volatilization
title 25th anniversary article: CVD polymers: a new paradigm for surface modification and device fabrication
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