Analysis of local regions near interfaces in nanostructured multicomponent (Ti-Zr-Hf-V-Nb)N coatings produced by the cathodic-arc-vapor-deposition from an arc of an evaporating cathode

Multicomponent nanostructured (Ti-Zr-Hf-V-Nb)N coatings produced by the cathodic-arc-vapor-deposition method have been studied using several complementary methods of elemental and structural analysis, such as those based on the use of slow positron beam (SPB); proton microbeam (μ-PIXE); electron micro- and nanobeam (EDS and SEM analysis); and X-ray diffraction phase analysis (XRD), including the a -sin 2 ϕ method of measuring the stress-strain state (X-ray tensometry). The elemental composition, microstructure, residual stresses in nanograins, and in-depth and surface distributions of defects and atoms, as well as the phase composition, stress-strain state, and texture of the coatings have been studied in a 3D representation. It has been found that creating a state of elastic stress-strain compression in the coating can significantly enhance its resistance to oxidation upon annealing. A redistribution of elements and defects (their aligning and segregation) due to diffusion and termination of spinodal segregation has been revealed near interfaces, around grains and subgrains, which occurred without a significant change in the average size of nanograins.