A substrate-free optical readout focal plane array with a heat sink structure
A substrate-free optical readout focal plane array (FPA) operating in 8-]12 mu m with a heat sink structure (HSS) was fabricated and its performance was tested. The temperature distribution of the FPA with an HSS investigated by using a commercial FLIR IR camera shows excellent uniformity. The therm...
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Veröffentlicht in: | Journal of semiconductors 2013-02, Vol.34 (2), p.24005-1-6 |
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Hauptverfasser: | , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | A substrate-free optical readout focal plane array (FPA) operating in 8-]12 mu m with a heat sink structure (HSS) was fabricated and its performance was tested. The temperature distribution of the FPA with an HSS investigated by using a commercial FLIR IR camera shows excellent uniformity. The thermal cross-talk effect existing in traditional substrate-free FPAs was eliminated effectively. The heat sink is fabricated successfully by electroplating copper, which provides high thermal capacity and high thermal conductivity, on the frame of substrate-free FPA. The FPA was tested in the optical-readout system, the results show that the response and NETD are 13.6 grey/K (F/# = 0.8) and 588 mK, respectively. |
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ISSN: | 1674-4926 |
DOI: | 10.1088/1674-4926/34/2/024005 |