Simultaneous Microfabrication and Tuning of the Permselective Properties in Microporous Polymers Using X-ray Lithography

Microchannels are fabricated using a photosensitive polymer to which microporosity is tuned with different X‐ray doses. Using hard X‐ray irradiation, the micropattern is positioned with various geometries in a multi‐level, three‐dimensional structure, while controlling the pore size and transport pr...

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Veröffentlicht in:Small (Weinheim an der Bergstrasse, Germany) Germany), 2013-07, Vol.9 (13), p.2277-2282
Hauptverfasser: Han, Sang Hoon, Doherty, Cara M., Marmiroli, Benedetta, Jo, Hye Jin, Buso, Dario, Patelli, Alessandro, Schiavuta, Piero, Innocenzi, Plinio, Lee, Young Moo, Thornton, Aaron W., Hill, Anita J., Falcaro, Paolo
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container_end_page 2282
container_issue 13
container_start_page 2277
container_title Small (Weinheim an der Bergstrasse, Germany)
container_volume 9
creator Han, Sang Hoon
Doherty, Cara M.
Marmiroli, Benedetta
Jo, Hye Jin
Buso, Dario
Patelli, Alessandro
Schiavuta, Piero
Innocenzi, Plinio
Lee, Young Moo
Thornton, Aaron W.
Hill, Anita J.
Falcaro, Paolo
description Microchannels are fabricated using a photosensitive polymer to which microporosity is tuned with different X‐ray doses. Using hard X‐ray irradiation, the micropattern is positioned with various geometries in a multi‐level, three‐dimensional structure, while controlling the pore size and transport properties of small molecules. This highly reliable fabrication process has potential for use in microfluidic devices with enhanced transport properties through microchannels.
doi_str_mv 10.1002/smll.201202735
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source Wiley Online Library Journals Frontfile Complete
subjects Lithography
Microchannels
microfabrication
Microfluidics
microporosity
Nanotechnology
Polymers
thermally rearranged polymers
Three dimensional
Transport properties
Tuning
X-ray lithography
X-rays
title Simultaneous Microfabrication and Tuning of the Permselective Properties in Microporous Polymers Using X-ray Lithography
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