Simultaneous Microfabrication and Tuning of the Permselective Properties in Microporous Polymers Using X-ray Lithography

Simultaneous Microfabrication and Tuning of the Permselective Properties in Microporous Polymers Using X-ray Lithography

Microchannels are fabricated using a photosensitive polymer to which microporosity is tuned with different X‐ray doses. Using hard X‐ray irradiation, the micropattern is positioned with various geometries in a multi‐level, three‐dimensional structure, while controlling the pore size and transport pr...

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Veröffentlicht in:Small (Weinheim an der Bergstrasse, Germany) Germany), 2013-07, Vol.9 (13), p.2277-2282
Hauptverfasser: Han, Sang Hoon, Doherty, Cara M., Marmiroli, Benedetta, Jo, Hye Jin, Buso, Dario, Patelli, Alessandro, Schiavuta, Piero, Innocenzi, Plinio, Lee, Young Moo, Thornton, Aaron W., Hill, Anita J., Falcaro, Paolo
Format: Artikel
Sprache:eng
Schlagworte:
Lithography
Microchannels
microfabrication
Microfluidics
microporosity
Nanotechnology
Polymers
thermally rearranged polymers
Three dimensional
Transport properties
Tuning
X-ray lithography
X-rays
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Beschreibung
Zusammenfassung:Microchannels are fabricated using a photosensitive polymer to which microporosity is tuned with different X‐ray doses. Using hard X‐ray irradiation, the micropattern is positioned with various geometries in a multi‐level, three‐dimensional structure, while controlling the pore size and transport properties of small molecules. This highly reliable fabrication process has potential for use in microfluidic devices with enhanced transport properties through microchannels.
ISSN:1613-6810
1613-6829
DOI:10.1002/smll.201202735