Study of Inductive Coupled Hydrogen and Argon Plasma Interaction with SiO sub(2) Glass

This work is devoted to the diagnostics of interaction between hydrogen and argon with the surface of SiO sub(2) glass walls. For diagnostics of the interaction, special high-frequency electrodeless light sources were prepared, filled with pure argon of 1Torr or argon-hydrogen of total pressure of 1Torr (Ar/H sub(2) mixing ratio is 9:1). Besides the mostly used spherical and cylindrical lamps, dumbbell type lamps have also been investigated. The spectroscopic and AFM measurements showed that in comparison with pure argon plasma, the argon-hydrogen plasma causes non-uniform changes of the SiO sub(2) surface. For these modifications active OH are primarily responsible molecules, created in the reactions of hydrogen molecules with oxygen molecules, adsorbed from the walls.