PEO-Like Coatings Prepared by Plasma-Based Techniques

PEO-Like Coatings Prepared by Plasma-Based Techniques

Polyethylene oxide (PEO)‐like films were prepared by rf magnetron sputtering of PEO and by thermal evaporation of PEO with and without activation by argon plasma. Rf magnetron sputtering under low power (

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Bibliographische Detailangaben
Veröffentlicht in:Plasma processes and polymers 2009-06, Vol.6 (S1), p.S21-S24
Hauptverfasser: Choukourov, Andrei, Polonskyi, Oleksandr, Hanus, Jan, Kousal, Jaroslav, Grinevich, Andrey, Slavinska, Danka, Biederman, Hynek
Format: Artikel
Sprache:eng
Schlagworte:
Activation
Argon plasma
Deposition
Ethers
Evaporation
Flux
Magnetron sputtering
PEO-like coatings
plasma polymerization
poly(ethylene oxide) (PEO)
Polyethylene oxides
sputtering
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Zusammenfassung:Polyethylene oxide (PEO)‐like films were prepared by rf magnetron sputtering of PEO and by thermal evaporation of PEO with and without activation by argon plasma. Rf magnetron sputtering under low power (
ISSN:1612-8850
1612-8869
DOI:10.1002/ppap.200930101