Influence of Hydrogen Plasma on the Defect Passivation of Polycrystalline Si Thin Film Solar Cells

Hydrogen passivation (HP) of polycrystalline silicon (poly‐Si) thin film solar cells was performed in a parallel plate radio‐frequency (rf) plasma setup. The influence of hydrogen pressure p and electrode gap d on breakdown voltage Vbrk is presented showing that the minimum in Vbrk shifts with highe...

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Veröffentlicht in:	Plasma processes and polymers 2009-06, Vol.6 (S1), p.S36-S40
Hauptverfasser:	Gorka, Benjamin, Rau, Björn, Dogan, Pinar, Becker, Christiane, Ruske, Florian, Gall, Stefan, Rech, Bernd
Format:	Artikel
Sprache:	eng
Schlagworte:	hydrogen passivation Hydrogen plasma plasma treatment polycrystalline silicon solar cells thin films
Online-Zugang:	Volltext
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