Selection of optimal parameters of the electronic probe of a scanning electron microscope in measurement of the geometric parameters of objects by means of a defocusing probe
Estimation of the procedural error of measurements of the geometric parameters of objects by a method involving defocusing of the electron probe of a scanning electron microscope is carried out. The procedural error is caused by the dependence of the results of measurements on the parameters of the...
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| Veröffentlicht in: | Measurement techniques 2012-11, Vol.55 (8), p.908-913 |
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| container_title | Measurement techniques |
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| creator | Alzoba, V. V. Kuzin, A. Yu Larionov, Yu. V. Rakov, A. V. Todua, P. A. Filippov, M. N. |
| description | Estimation of the procedural error of measurements of the geometric parameters of objects by a method involving defocusing of the electron probe of a scanning electron microscope is carried out. The procedural error is caused by the dependence of the results of measurements on the parameters of the probe. It is shown that this error may be reduced by selecting optimal parameters of the probe at which the actual measurement conditions correspond in the best way possible to the requirements of the computational model. |
| doi_str_mv | 10.1007/s11018-012-0059-z |
| format | Article |
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| ispartof | Measurement techniques, 2012-11, Vol.55 (8), p.908-913 |
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| subjects | Analysis Analytical Chemistry Characterization and Evaluation of Materials Defocusing Electron microscopes Electron probes Electronics Error analysis Errors Mathematical models Measurement Science and Instrumentation Measurement techniques Optimization Physical Chemistry Physics Physics and Astronomy Scanning electron microscopy Studies |
| title | Selection of optimal parameters of the electronic probe of a scanning electron microscope in measurement of the geometric parameters of objects by means of a defocusing probe |
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