Selection of optimal parameters of the electronic probe of a scanning electron microscope in measurement of the geometric parameters of objects by means of a defocusing probe

Estimation of the procedural error of measurements of the geometric parameters of objects by a method involving defocusing of the electron probe of a scanning electron microscope is carried out. The procedural error is caused by the dependence of the results of measurements on the parameters of the probe. It is shown that this error may be reduced by selecting optimal parameters of the probe at which the actual measurement conditions correspond in the best way possible to the requirements of the computational model.