Nondestructive method for evaluation of electrical parameters of AlGaN/GaN HEMT heterostructures

Impedance spectroscopy methods were proposed for direct evaluation of electrical properties of the AlGaN/GaN heterostructures. The impedance spectra were measured using a two contact mercury probe. Application of the proper distributed elements equivalent circuits enabled to evaluate not only the ty...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Physica status solidi. C 2013-03, Vol.10 (3), p.490-493
Hauptverfasser:	Paszkiewicz, Bogdan, Wosko, Mateusz, Paszkiewicz, Regina, Tlaczala, Marek
Format:	Artikel
Sprache:	eng
Schlagworte:	AlGaN/GaN Aluminum gallium nitrides Carrier density Channels Electric potential Gallium nitrides HEMT Heterostructures impedance spectroscopy Planetary probes Reproduction
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!