Nondestructive method for evaluation of electrical parameters of AlGaN/GaN HEMT heterostructures

Impedance spectroscopy methods were proposed for direct evaluation of electrical properties of the AlGaN/GaN heterostructures. The impedance spectra were measured using a two contact mercury probe. Application of the proper distributed elements equivalent circuits enabled to evaluate not only the ty...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Physica status solidi. C 2013-03, Vol.10 (3), p.490-493
Hauptverfasser: Paszkiewicz, Bogdan, Wosko, Mateusz, Paszkiewicz, Regina, Tlaczala, Marek
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 493
container_issue 3
container_start_page 490
container_title Physica status solidi. C
container_volume 10
creator Paszkiewicz, Bogdan
Wosko, Mateusz
Paszkiewicz, Regina
Tlaczala, Marek
description Impedance spectroscopy methods were proposed for direct evaluation of electrical properties of the AlGaN/GaN heterostructures. The impedance spectra were measured using a two contact mercury probe. Application of the proper distributed elements equivalent circuits enabled to evaluate not only the typically obtained parameters of the heterostructures such as sheet carriers concentration and its pinch off voltage but also the dependence of the channel sheet resistance and the mobility of 2DEG on d.c. gate bias (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
doi_str_mv 10.1002/pssc.201200709
format Article
fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_1439731563</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1439731563</sourcerecordid><originalsourceid>FETCH-LOGICAL-c3889-1ae3d087765090df90b3ca891f27ab9d6e4b5c340757b0aa36a61021308488b83</originalsourceid><addsrcrecordid>eNqFkEtP4zAURiMEEq_Zso7Ehk3ae-3EjyWqIAWVzkgwmtkZx3FEIK2LnfD497gKQmg2s7Bs6Z5z5e9LkhOECQKQ6SYEMyGABICD3EkOkCFkyHKyG9-CkYzRAveTwxAeAWgByA6S-6Vb1zb0fjB9-2LTle0fXJ02zqf2RXeD7lu3Tl2T2s6a3rdGd-lGex0568N2cN6VejmNJ51f3NylD9uBGxcO3objZK_RXbA_Pu-j5Pflxd1sni1-llez80VmqBAyQ21pDYJzVoCEupFQUaOFxIZwXcma2bwqDM2BF7wCrSnTMR1BCiIXohL0KDkb9268ex5iIrVqg7Fdp9fWDUFhTiWnWDAa0dN_0Ec3-HX8nUJKYn1EAEZqMlImxgneNmrj25X27wpBbQtX28LVV-FRkKPw2nb2_T-0-nV7O_vuZqPbht6-fbnaPynGKS_Un2WpCnGNZflXqhn9ALv_kv0</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1322002801</pqid></control><display><type>article</type><title>Nondestructive method for evaluation of electrical parameters of AlGaN/GaN HEMT heterostructures</title><source>Wiley Online Library All Journals</source><creator>Paszkiewicz, Bogdan ; Wosko, Mateusz ; Paszkiewicz, Regina ; Tlaczala, Marek</creator><creatorcontrib>Paszkiewicz, Bogdan ; Wosko, Mateusz ; Paszkiewicz, Regina ; Tlaczala, Marek</creatorcontrib><description>Impedance spectroscopy methods were proposed for direct evaluation of electrical properties of the AlGaN/GaN heterostructures. The impedance spectra were measured using a two contact mercury probe. Application of the proper distributed elements equivalent circuits enabled to evaluate not only the typically obtained parameters of the heterostructures such as sheet carriers concentration and its pinch off voltage but also the dependence of the channel sheet resistance and the mobility of 2DEG on d.c. gate bias (© 2013 WILEY‐VCH Verlag GmbH &amp; Co. KGaA, Weinheim)</description><identifier>ISSN: 1862-6351</identifier><identifier>EISSN: 1610-1642</identifier><identifier>DOI: 10.1002/pssc.201200709</identifier><language>eng</language><publisher>Berlin: WILEY-VCH Verlag</publisher><subject>AlGaN/GaN ; Aluminum gallium nitrides ; Carrier density ; Channels ; Electric potential ; Gallium nitrides ; HEMT ; Heterostructures ; impedance spectroscopy ; Planetary probes ; Reproduction</subject><ispartof>Physica status solidi. C, 2013-03, Vol.10 (3), p.490-493</ispartof><rights>Copyright © 2013 WILEY‐VCH Verlag GmbH &amp; Co. KGaA, Weinheim</rights><rights>Copyright © 2013 WILEY-VCH Verlag GmbH &amp; Co. KGaA, Weinheim</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c3889-1ae3d087765090df90b3ca891f27ab9d6e4b5c340757b0aa36a61021308488b83</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://onlinelibrary.wiley.com/doi/pdf/10.1002%2Fpssc.201200709$$EPDF$$P50$$Gwiley$$H</linktopdf><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1002%2Fpssc.201200709$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>314,780,784,1416,27923,27924,45573,45574</link.rule.ids></links><search><creatorcontrib>Paszkiewicz, Bogdan</creatorcontrib><creatorcontrib>Wosko, Mateusz</creatorcontrib><creatorcontrib>Paszkiewicz, Regina</creatorcontrib><creatorcontrib>Tlaczala, Marek</creatorcontrib><title>Nondestructive method for evaluation of electrical parameters of AlGaN/GaN HEMT heterostructures</title><title>Physica status solidi. C</title><addtitle>Phys. Status Solidi C</addtitle><description>Impedance spectroscopy methods were proposed for direct evaluation of electrical properties of the AlGaN/GaN heterostructures. The impedance spectra were measured using a two contact mercury probe. Application of the proper distributed elements equivalent circuits enabled to evaluate not only the typically obtained parameters of the heterostructures such as sheet carriers concentration and its pinch off voltage but also the dependence of the channel sheet resistance and the mobility of 2DEG on d.c. gate bias (© 2013 WILEY‐VCH Verlag GmbH &amp; Co. KGaA, Weinheim)</description><subject>AlGaN/GaN</subject><subject>Aluminum gallium nitrides</subject><subject>Carrier density</subject><subject>Channels</subject><subject>Electric potential</subject><subject>Gallium nitrides</subject><subject>HEMT</subject><subject>Heterostructures</subject><subject>impedance spectroscopy</subject><subject>Planetary probes</subject><subject>Reproduction</subject><issn>1862-6351</issn><issn>1610-1642</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNqFkEtP4zAURiMEEq_Zso7Ehk3ae-3EjyWqIAWVzkgwmtkZx3FEIK2LnfD497gKQmg2s7Bs6Z5z5e9LkhOECQKQ6SYEMyGABICD3EkOkCFkyHKyG9-CkYzRAveTwxAeAWgByA6S-6Vb1zb0fjB9-2LTle0fXJ02zqf2RXeD7lu3Tl2T2s6a3rdGd-lGex0568N2cN6VejmNJ51f3NylD9uBGxcO3objZK_RXbA_Pu-j5Pflxd1sni1-llez80VmqBAyQ21pDYJzVoCEupFQUaOFxIZwXcma2bwqDM2BF7wCrSnTMR1BCiIXohL0KDkb9268ex5iIrVqg7Fdp9fWDUFhTiWnWDAa0dN_0Ec3-HX8nUJKYn1EAEZqMlImxgneNmrj25X27wpBbQtX28LVV-FRkKPw2nb2_T-0-nV7O_vuZqPbht6-fbnaPynGKS_Un2WpCnGNZflXqhn9ALv_kv0</recordid><startdate>201303</startdate><enddate>201303</enddate><creator>Paszkiewicz, Bogdan</creator><creator>Wosko, Mateusz</creator><creator>Paszkiewicz, Regina</creator><creator>Tlaczala, Marek</creator><general>WILEY-VCH Verlag</general><general>WILEY‐VCH Verlag</general><general>Wiley Subscription Services, Inc</general><scope>BSCLL</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>7QF</scope><scope>7QQ</scope><scope>7SR</scope><scope>JG9</scope></search><sort><creationdate>201303</creationdate><title>Nondestructive method for evaluation of electrical parameters of AlGaN/GaN HEMT heterostructures</title><author>Paszkiewicz, Bogdan ; Wosko, Mateusz ; Paszkiewicz, Regina ; Tlaczala, Marek</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c3889-1ae3d087765090df90b3ca891f27ab9d6e4b5c340757b0aa36a61021308488b83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>AlGaN/GaN</topic><topic>Aluminum gallium nitrides</topic><topic>Carrier density</topic><topic>Channels</topic><topic>Electric potential</topic><topic>Gallium nitrides</topic><topic>HEMT</topic><topic>Heterostructures</topic><topic>impedance spectroscopy</topic><topic>Planetary probes</topic><topic>Reproduction</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Paszkiewicz, Bogdan</creatorcontrib><creatorcontrib>Wosko, Mateusz</creatorcontrib><creatorcontrib>Paszkiewicz, Regina</creatorcontrib><creatorcontrib>Tlaczala, Marek</creatorcontrib><collection>Istex</collection><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Aluminium Industry Abstracts</collection><collection>Ceramic Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Materials Research Database</collection><jtitle>Physica status solidi. C</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Paszkiewicz, Bogdan</au><au>Wosko, Mateusz</au><au>Paszkiewicz, Regina</au><au>Tlaczala, Marek</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Nondestructive method for evaluation of electrical parameters of AlGaN/GaN HEMT heterostructures</atitle><jtitle>Physica status solidi. C</jtitle><addtitle>Phys. Status Solidi C</addtitle><date>2013-03</date><risdate>2013</risdate><volume>10</volume><issue>3</issue><spage>490</spage><epage>493</epage><pages>490-493</pages><issn>1862-6351</issn><eissn>1610-1642</eissn><abstract>Impedance spectroscopy methods were proposed for direct evaluation of electrical properties of the AlGaN/GaN heterostructures. The impedance spectra were measured using a two contact mercury probe. Application of the proper distributed elements equivalent circuits enabled to evaluate not only the typically obtained parameters of the heterostructures such as sheet carriers concentration and its pinch off voltage but also the dependence of the channel sheet resistance and the mobility of 2DEG on d.c. gate bias (© 2013 WILEY‐VCH Verlag GmbH &amp; Co. KGaA, Weinheim)</abstract><cop>Berlin</cop><pub>WILEY-VCH Verlag</pub><doi>10.1002/pssc.201200709</doi><tpages>4</tpages></addata></record>
fulltext fulltext
identifier ISSN: 1862-6351
ispartof Physica status solidi. C, 2013-03, Vol.10 (3), p.490-493
issn 1862-6351
1610-1642
language eng
recordid cdi_proquest_miscellaneous_1439731563
source Wiley Online Library All Journals
subjects AlGaN/GaN
Aluminum gallium nitrides
Carrier density
Channels
Electric potential
Gallium nitrides
HEMT
Heterostructures
impedance spectroscopy
Planetary probes
Reproduction
title Nondestructive method for evaluation of electrical parameters of AlGaN/GaN HEMT heterostructures
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-11T00%3A10%3A38IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Nondestructive%20method%20for%20evaluation%20of%20electrical%20parameters%20of%20AlGaN/GaN%20HEMT%20heterostructures&rft.jtitle=Physica%20status%20solidi.%20C&rft.au=Paszkiewicz,%20Bogdan&rft.date=2013-03&rft.volume=10&rft.issue=3&rft.spage=490&rft.epage=493&rft.pages=490-493&rft.issn=1862-6351&rft.eissn=1610-1642&rft_id=info:doi/10.1002/pssc.201200709&rft_dat=%3Cproquest_cross%3E1439731563%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1322002801&rft_id=info:pmid/&rfr_iscdi=true