Note: automatic mass-flow configuration method for evaluating turbomolecular pump performance

An automatic mass-flow configuration method is presented for the evaluation of turbomolecular pump performance. This configuration method is used to obtain an effective mass-flow rate. In addition, the throughput, inlet pressure, and compression ratio are evaluated. The throughput increases with the mass-flow rate. Moreover, the compression ratio increases almost linearly with the outlet pressure for mass-flow rates from 2.97 × 10(-9) to 3.96 × 10(-7) kg/s. Finally, empirical correlations are proposed for the throughput and inlet pressure.