Consideration of the electron energy distribution function shape in a Ar and N2 global model
This paper presents a method to compensate the effects of the electron energy distribution function (EEDF) shape on plasma characteristics when using global models to describe Ar and N2 inductively coupled discharges. A non-Maxwellian global model is developed for the pressure range 1-1000 mTorr by...
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Veröffentlicht in: | Journal of applied physics 2012-11, Vol.112 (10) |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | This paper presents a method to compensate the effects of the electron energy distribution function (EEDF) shape on plasma characteristics when using global models to describe Ar and N2 inductively coupled discharges. A non-Maxwellian global model is developed for the pressure range 1-1000 mTorr by using an user-friendly Boltzmann equation solver to calculate the EEDF. The calculated EEDFs are compared with the measurements performed with a single Langmuir probe in the same conditions. We also compare the calculated results by using the Boltzmann equation solver with the results by assuming a Maxwellian EEDF and point out the influence of both methods on the contribution of the multi-step process on ionization. Finally, to take into account the shape of the EEDF in global models, abacuses are presented as a function of the absorbed power density and the pressure for typical Ar and N2 planar ICP discharges. |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.4765728 |