Processing of c-BN Film from B4C Target Using R.F. Magnetron Sputtering

The cubic boron nitride (c-BN) film has unique physical and chemical properties such as extreme hardness next to diamond, excellent chemical inertness, high thermal conductivity, and thermal stability. In this study, c-BN thin films were processed on WC substrates using B4C targets in R.F. magnetron...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	AIP conference proceedings 2012-03
Hauptverfasser:	Oh, Seungkeun, Kim, Youngman
Format:	Artikel
Sprache:	eng
Schlagworte:	Absorption spectra Bias Bonding Electric potential Magnetron sputtering Morphology Thermal conductivity Voltage
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!