3-D Micro Coaxial Transmission Lines With Integrated MEM Capacitors

This paper introduces a 20 mum-tall, rectangular micro coaxial transmission line with an embedded micro electromechanical (MEM) capacitor. The measured capacitance ratio is about 6.5 with an actuation voltage of 30-50 V. To the best of the authors' knowledge, this is the first time a MEM device...

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Veröffentlicht in:	IEEE microwave and wireless components letters 2007-12, Vol.17 (12), p.858-860
Hauptverfasser:	Natarajan, S.P., Weller, T.M., Hoff, A.M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Beams (radiation) Capacitance Capacitors Coaxial cables Coaxial components Conductors Devices Distributed parameter circuits Electric potential Electronics Exact sciences and technology Fabrication Impedance Micro coax capacitor micro electromechanical (MEM) capacitor Micro- and nanoelectromechanical devices (mems/nems) Microwaves Radio frequency rectangular coax Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Three dimensional Transmission lines variable capacitor Voltage
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Beschreibung
Zusammenfassung:	This paper introduces a 20 mum-tall, rectangular micro coaxial transmission line with an embedded micro electromechanical (MEM) capacitor. The measured capacitance ratio is about 6.5 with an actuation voltage of 30-50 V. To the best of the authors' knowledge, this is the first time a MEM device has been implemented within a fully-shielded, micro coaxial transmission line structure. The fabrication includes a single step release process for a dual layer suspended structure (beam and the top lid).
ISSN:	1531-1309 2771-957X 1558-1764 2771-9588
DOI:	10.1109/LMWC.2007.910487