Oxidation of hydrocarbon films and metal materials in oxygen-containing low temperature plasma

Glow discharge in oxygen-containing gases (air, a mixture of O 2 /N 2 , N 2 O) was used for selective removal of amorphous hydrocarbon (a-C:H) films predeposited on stainless steel, W, and Mo. The gasification rate of films was maximal in N 2 O. H 2 , H 2 O, CO, and CO 2 were plasmolysis products. T...

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Veröffentlicht in:	Protection of metals and physical chemistry of surfaces 2012-12, Vol.48 (7), p.790-795
Hauptverfasser:	Gorodetskiy, A. E., Zalavutdinov, R. K., Bukhovets, V. L., Zakharov, A. P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Carbon dioxide Carbon monoxide Characterization and Evaluation of Materials Chemistry and Materials Science Conversion Coatings Corrosion and Coatings Hydrocarbons Industrial Chemistry/Chemical Engineering Inorganic Chemistry Materials Science Metallic Materials Nitrous oxides Oxides Physical chemistry Plasmolysis Stainless steels Tribology
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Beschreibung
Zusammenfassung:	Glow discharge in oxygen-containing gases (air, a mixture of O 2 /N 2 , N 2 O) was used for selective removal of amorphous hydrocarbon (a-C:H) films predeposited on stainless steel, W, and Mo. The gasification rate of films was maximal in N 2 O. H 2 , H 2 O, CO, and CO 2 were plasmolysis products. Thin (3–30 nm) oxide layers, the thicknesses of which depended on the location of samples relative to plasma, formed on the metal after removal of the film.
ISSN:	2070-2051 2070-206X
DOI:	10.1134/S2070205112070052