Pulsed laser deposition of metals: consequences of the energy distribution within the laser spot on film growth

The strong influence of the lens position during pulsed laser deposition of metallic films is shown by measuring the energy distribution within the laser spot and its consequences for the deposition rate and kinetic energy of the deposited ions. This is analyzed together with the spot size and the d...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2004-09, Vol.79 (4-6), p.1005-1007
Hauptverfasser:	BRANDENBURG, J, NEU, V, WENDROCK, H, HOLZAPEEL, B, KREBS, H.-U, FÄHLER, S
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Deposition Energy distribution Exact sciences and technology Film growth Kinetic energy Laser deposition Lasers Lenses Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Pulsed laser deposition
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Beschreibung
Zusammenfassung:	The strong influence of the lens position during pulsed laser deposition of metallic films is shown by measuring the energy distribution within the laser spot and its consequences for the deposition rate and kinetic energy of the deposited ions. This is analyzed together with the spot size and the dependence of the deposition rate on the overall laser energy .
ISSN:	0947-8396 1432-0630
DOI:	10.1007/s00339-004-2615-0