Downwards to metrology in nanoscale: determination of the AFM tip shape with well-known sharp-edged calibration structures

More and more AFMs and AFM profilers will be used to quantify micro- and nanostructures. For a correct characterization and evaluation of the measured structural details, in the nanoscale range, knowledge of the current shape of the AFM tip is needed. Often, the interaction between the AFM tip and the sample leads to a change in the tip shape. Our concept for the determination of tip shapes is based on the measurement of a well-known sharp-edged silicon structure. Each calibration sample contains a selected structure serving as a calibrated width standard, and has a certified pitch. Consequently, the shape of AFM tips can be determined with an accuracy of 10 nm.