Large-area metallic photonic crystal fabrication with interference lithography and dry etching
Large-area one-dimensional periodic metallic structures were fabricated on a waveguide layer with interference lithography and dry etching. As narrow as 115-nm gold nanowires were obtained with a period of 395 nm, covering a homogeneous area as large as 5 X 5 mm. Extinction measurements demonstrate...
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| Veröffentlicht in: | Applied physics. B, Lasers and optics Lasers and optics, 2005-07, Vol.81 (2-3), p.271-275 |
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| container_issue | 2-3 |
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| container_title | Applied physics. B, Lasers and optics |
| container_volume | 81 |
| creator | Guo, H. C. Nau, D. Radke, A. Zhang, X. P. Stodolka, J. Yang, X. L. Tikhodeev, S. G. Gippius, N. A. Giessen, H. |
| description | Large-area one-dimensional periodic metallic structures were fabricated on a waveguide layer with interference lithography and dry etching. As narrow as 115-nm gold nanowires were obtained with a period of 395 nm, covering a homogeneous area as large as 5 X 5 mm. Extinction measurements demonstrate the strong coupling between waveguide mode and gold-particle plasmon resonance. We demonstrate good agreement with a scattering-matrix theory. The dispersion of the metallic photonic crystals was obtained by angle-resolved measurements. This method represents a simple and low-cost way to fabricate large-area metallic photonic crystals. |
| doi_str_mv | 10.1007/s00340-005-1817-2 |
| format | Article |
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| ispartof | Applied physics. B, Lasers and optics, 2005-07, Vol.81 (2-3), p.271-275 |
| issn | 0946-2171 1432-0649 |
| language | eng |
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| source | SpringerLink Journals - AutoHoldings |
| subjects | Dispersions Drying Etching Interference Lithography Nanowires Photonic crystals Waveguides |
| title | Large-area metallic photonic crystal fabrication with interference lithography and dry etching |
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