The orientation-selective growth of LaNiO3 films on Si(100) by pulsed laser deposition using a MgO buffer
Highly (100)-oriented, (110)-oriented and polycrystalline LaNiO3 (LNO) films were successfully prepared on Si(100) using an oriented MgO film as a buffer. It was somewhat surprising to find that that the orientation relation between the LNO film and the corresponding MgO buffer was: LNO(100)\MgO(110...
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Veröffentlicht in: | Applied physics. A, Materials science & processing Materials science & processing, 2002-10, Vol.75 (4), p.545-549 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Highly (100)-oriented, (110)-oriented and polycrystalline LaNiO3 (LNO) films were successfully prepared on Si(100) using an oriented MgO film as a buffer. It was somewhat surprising to find that that the orientation relation between the LNO film and the corresponding MgO buffer was: LNO(100)\MgO(110), LNO(110)\MgO(111) and LNO(polycrystalline)\MgO(100). The crystalline quality of the LNO films was shown to be sensitive to the preparation conditions of the MgO buffer. The film surface was very smooth, without micrometer-sized droplets being observed. All LNO films were of metallic conductivity, with a room-temperature resistivities of approximately 250, 280 and 420 *m*Wcm for the (110)-oriented, (100)-oriented and polycrystalline LNO, respectively. |
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ISSN: | 0947-8396 1432-0630 |
DOI: | 10.1007/s003390101048 |