Excimer laser-induced microbumps on preheated BK7-glass

Microbumps on BK7-glass are made by nanosecond KrF-excimer laser irradiation. Bumps with heights in the micrometer-range and a diameter of about 20 μm are reproducibly obtained in the case of a preheated glass substrate. Preheating and laser-induced local heating act together to exceed the glass tra...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2009-06, Vol.95 (3), p.639-642
Hauptverfasser:	Zahariev, P., Mechkarov, N., Danev, G., Ihlemann, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Arrays Characterization and Evaluation of Materials Condensed Matter Physics Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Glass transition temperature Heating Lasers Machines Manufacturing Microorganisms Nanocomposites Nanomaterials Nanostructure Nanotechnology Optical and Electronic Materials Physical radiation effects, radiation damage Physics Physics and Astronomy Processes Rapid Communication Structure of solids and liquids crystallography Surfaces and Interfaces Thin Films Ultraviolet, visible, and infrared radiation effects (including laser radiation)
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Beschreibung
Zusammenfassung:	Microbumps on BK7-glass are made by nanosecond KrF-excimer laser irradiation. Bumps with heights in the micrometer-range and a diameter of about 20 μm are reproducibly obtained in the case of a preheated glass substrate. Preheating and laser-induced local heating act together to exceed the glass transition temperature on a volume forming a bump due to the action of surface tension. This process may open up a route to the rapid fabrication of microlens arrays.
ISSN:	0947-8396 1432-0630
DOI:	10.1007/s00339-009-5143-0