Pulsed laser deposition of magnetic films by ablation of Co- and Fe-based amorphous alloys

Magnetic films were prepared by pulsed laser ablation of amorphous magnetic ribbons (composition Co67Cr7Fe4Si8B14, Fe73.5Nb3Cu1Si13.5B9, and Fe40Ni40B20) and permalloy foils (composition FexNi1-x with x=22,50). Depositions were performed in a vacuum of (2--4)X10 Pa by KrF excimer laser pulses at fluences of between 2 and 7 J{/content/KR8KJRTJ22UVXTXK/xxlarge8201.gif}cm. Films were deposited on oxidized silicon wafers, placed 60--80 mm apart from the target. Films were analyzed by SEM, XRD, RBS, and EDS. Ferromagnetic resonance (FMR) spectra were studied at GHz frequencies. From RBS and EDS measurements it follows that the stoichiometry of the targets is preserved in the films to a large extent. The films deposited from amorphous targets remain amorphous. From FMR studies it follows that Fe and Fe-Ni rich films exhibit properties close to those of bulk alloys, having very low magnetization motion damping parameter ({/content/KR8KJRTJ22UVXTXK/xxlarge955.gif}) of 7.0--7.8X10 rad/s, which are appropriate for fast magnetic sensors.