Fabrication of dual-focus dual-layered microlens

Fabrication of dual-focus dual-layered microlens

Novel structure of dual-focus microlens array with dual layers is proposed. Dual-focus microlenses formed by combination of dual layers of concentric spherical lenses are fabricated through photo lithography and dry etching processes. The dual lens is formed by combination of a thermally reflowed ph...

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Veröffentlicht in:Optics communications 2013-02, Vol.289, p.69-74
Hauptverfasser: Lee, Jong-Moo, Lee, Donghyo, Baek, Yongsoon
Format: Artikel
Sprache:eng
Schlagworte:
Arrays
Drying
Etching
Fused quartz
Integrated optics
Lenses
Lithography
Microlenses
Optical devices
Optical elements
Resists
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Beschreibung
Zusammenfassung:Novel structure of dual-focus microlens array with dual layers is proposed. Dual-focus microlenses formed by combination of dual layers of concentric spherical lenses are fabricated through photo lithography and dry etching processes. The dual lens is formed by combination of a thermally reflowed photo resist lens on a fused quartz lens which is formed by dry etching of the fused quartz substrate.
ISSN:0030-4018
1873-0310
DOI:10.1016/j.optcom.2012.09.076