Topographic optical profilometry by absorption in liquids

Optical absorbance within a liquid is used as a photometric probe to measure the topography of optical surfaces relative to a reference. The liquid fills the gap between the reference surface and the measuring surface. By comparing two transmission images at different wavelengths we can profile the...

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Veröffentlicht in:Optics express 2012-12, Vol.20 (27), p.28631-28640
Hauptverfasser: Antón, Juan Carlos Martinez, Alonso, Jose, Pedrero, Jose Antonio Gómez, Quiroga, Juan Antonio
Format: Artikel
Sprache:eng
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Zusammenfassung:Optical absorbance within a liquid is used as a photometric probe to measure the topography of optical surfaces relative to a reference. The liquid fills the gap between the reference surface and the measuring surface. By comparing two transmission images at different wavelengths we can profile the height distribution in a simple and reliable way. The presented method handles steep surface slopes (
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.20.028631