Topographic optical profilometry by absorption in liquids
Optical absorbance within a liquid is used as a photometric probe to measure the topography of optical surfaces relative to a reference. The liquid fills the gap between the reference surface and the measuring surface. By comparing two transmission images at different wavelengths we can profile the...
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Veröffentlicht in: | Optics express 2012-12, Vol.20 (27), p.28631-28640 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Optical absorbance within a liquid is used as a photometric probe to measure the topography of optical surfaces relative to a reference. The liquid fills the gap between the reference surface and the measuring surface. By comparing two transmission images at different wavelengths we can profile the height distribution in a simple and reliable way. The presented method handles steep surface slopes ( |
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ISSN: | 1094-4087 1094-4087 |
DOI: | 10.1364/OE.20.028631 |