Nanoscale Fresnel coherent diffraction imaging tomography using ptychography
We demonstrate Fresnel Coherent Diffractive Imaging (FCDI) tomography in the X-ray regime. The method uses an incident X-ray illumination with known curvature in combination with ptychography to overcome existing problems in diffraction imaging. The resulting tomographic reconstruction represents a...
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Veröffentlicht in: | Optics express 2012-10, Vol.20 (22), p.24678-24685 |
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container_title | Optics express |
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creator | Peterson, I Abbey, B Putkunz, C T Vine, D J van Riessen, G A Cadenazzi, G A Balaur, E Ryan, R Quiney, H M McNulty, I Peele, A G Nugent, K A |
description | We demonstrate Fresnel Coherent Diffractive Imaging (FCDI) tomography in the X-ray regime. The method uses an incident X-ray illumination with known curvature in combination with ptychography to overcome existing problems in diffraction imaging. The resulting tomographic reconstruction represents a 3D map of the specimen's complex refractive index at nano-scale resolution. We use this technique to image a lithographically fabricated glass capillary, in which features down to 70nm are clearly resolved. |
doi_str_mv | 10.1364/OE.20.024678 |
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title | Nanoscale Fresnel coherent diffraction imaging tomography using ptychography |
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