Nanoscale Fresnel coherent diffraction imaging tomography using ptychography

We demonstrate Fresnel Coherent Diffractive Imaging (FCDI) tomography in the X-ray regime. The method uses an incident X-ray illumination with known curvature in combination with ptychography to overcome existing problems in diffraction imaging. The resulting tomographic reconstruction represents a...

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Veröffentlicht in:Optics express 2012-10, Vol.20 (22), p.24678-24685
Hauptverfasser: Peterson, I, Abbey, B, Putkunz, C T, Vine, D J, van Riessen, G A, Cadenazzi, G A, Balaur, E, Ryan, R, Quiney, H M, McNulty, I, Peele, A G, Nugent, K A
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Sprache:eng
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Zusammenfassung:We demonstrate Fresnel Coherent Diffractive Imaging (FCDI) tomography in the X-ray regime. The method uses an incident X-ray illumination with known curvature in combination with ptychography to overcome existing problems in diffraction imaging. The resulting tomographic reconstruction represents a 3D map of the specimen's complex refractive index at nano-scale resolution. We use this technique to image a lithographically fabricated glass capillary, in which features down to 70nm are clearly resolved.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.20.024678