Neural Net Based Optimization of Wet Thermal Lateral Oxidation Rates

Data is available from experimental significant study which discusses vertical -cavity surface -emitting laser (VCSEL) performance that has been realized by employing wet thermal oxidation of selected AIxGa 1-x layers in the device structure to form the current apertures and to provide the lateral index guiding for the lasing mode [1,3]. [...] the stability of bubbler temperature, gas flow calibration and good control should be the minimum requirements to insure repeatable and uniform oxidation for VCSEL fabrication. 3. The neural net based optimizer objective in the lateral oxidation process is to predict the regulating temperature and the percentage of AlAs mole fraction which will match the desired target value of the lateral oxidation rate (µm/min).